5 Research on Reflective Film System of Solar Heat Treatment Furnace Chen Rongfa Liu Jianhong Jiang Shihang Yangzhou University School of Materials Research Center Yangzhou 225009 has a shooting rate of over 90, focusing on solar energy and meeting metal heat treatment requirements.
2 Reflector 1 skill shaft rotation mechanism high-reflection film system preparation coating equipment and parameters; this experiment uses 204 type active reaction magnetron sputtering coating equipment and 221400 type evaporation coating equipment together, the equipment parameters are as follows: equipment type 104 active reaction Magnetron sputtering coating equipment 221400 type evaporation coating equipment vacuum chamber size limit vacuum revolution speed rotation speed sputtering power solar heat treatment furnace structure design This experiment uses 200,1 diameter metal paraboloid focusing solar heat treatment equipment, the structure is as follows, the mirror Use an off-axis rotation paraboloid.
The focal spot diameter is 60, the concentration ratio is 625, and the size of the coke oven is 600.
Coating process Metal paraboloid polishing pretreatment Coating undercoating drying Sputtering aluminum film evaporation 8 film system aging into the atmosphere to take out the workpiece.
Jiangsu Provincial Education Commission Natural Science Funded Project Coating Process Optimization Parameters Magnetron Sputtering Optimization Parameters Evaporation Coating Optimization Parameters Vacuum Degree No. 3, Chongguang 4 9 Vacuum Background 2 Father é‚™ Ugly Sputtering Current 22.5 Sputtering Voltage 575, Irradiation time 8, film thickness 2.5, 1 workpiece rotation speed 10617, also 1 workpiece revolution speed lOrmin evaporation boat pre-melting current 1.8 evaporation boat evaporation current 2.5 evaporation boat evaporation time 2.6, 1 film thickness 1.8um workpiece rotation speed 90, 1 The workpiece revolution speed is 15, the film-based weather resistance test film adhesion test with the substrate is 8.6512, and the 3,1 tape of 1 is pressed on the outside of the coating film, and then slowly peeled off, and the film layer is found to have no peeling off. .
The constant damp heat test temperature is 55±20, and the relative humidity is 98. The membrane layer is placed in 24 layers without any shedding, and the white light emissivity at any point is not less than 85.
The friction test was performed with a cotton wool wiper without any scratches when wiped under 10 pressures.
The high and low temperature test did not fall off after the test 3 in a high temperature environment of 62 ± 2 and 5 ± 2 of the buttocks.
After the salt spray test, the film surface of the workpiece was exposed to salt spray in the salt film without corrosion and corrosion.
Conclusion The average reflectivity of the film system MAlAl2OrSiO is 92, which is tested under the sunny weather in the middle of the month. The heating temperature reaches 780.75 in 50 claws, the heating temperature reaches 860., 90, and the heating temperature reaches 920. The heating temperature is 120. Up to 960 has reached the heating temperature requirement for heat treatment of some parts at this temperature. This small industrial solar prototype is inexpensive to produce, has no pollution, and is easy to mass produce. It is a development direction of vacuum coating for new energy and industrial heating.
1 item Licheng, Zhao Yuwen, Luo Yunjun. Thermal utilization of solar energy. Beijing Aerospace Publishing House, 1990, 67.
2 Fan Yudian and other translations, 1.31. Surface Modification Engineer's Guide, Beijing Tsinghua University Press, 1990, 245.
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